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Abstract Remote plasmas are used in semiconductor device manufacturing as sources of radicals for chamber cleaning and isotropic etching. In these applications, large fluxes of neutral radicals (e.g. F, O, Cl, H) are desired with there being negligible fluxes of potentially damaging ions and photons. One remote plasma source (RPS) design employs toroidal, transformer coupling using ferrite cores to dissociate high flows of moderately high pressure (up to several Torr) electronegative gases. In this paper, results are discussed from a computational investigation of moderate pressure, toroidal transformer coupled RPS sustained in Ar and Ar/NF₃mixtures. Operation of the RPS in 1 Torr (133 Pa) of argon with a power of 1.0 kW at 0.5 MHz and a single core produces a continuous toroidal plasma loop with current continuity being maintained dominantly by conduction current. Operation with dual cores introduces azimuthal asymmetries with local maxima in plasma density. Current continuity is maintained by a mix of conduction and displacement current. Operation in NF₃for the same conditions produces essentially complete NF₃dissociation. Electron depletion as a result of dissociative attachment of NF₃and NF_xfragments significantly alters the discharge topology, confining the electron density to the downstream portion of the source where the NF_xdensity has been lowered by this dissociation. 

Focal ratio degradation (FRD), the decrease of light’s focal ratio between the input into an optical fiber and the output, is important to characterize for astronomical spectrographs due to its effects on throughput and the point spread function. However, while FRD is a function of many fiber properties such as stresses, microbending, and surface imperfections, angular misalignments between the incoming light and the face of the fiber also affect the light profile and complicate this measurement. A compact experimental setup and a model separating FRD from angular misalignment was applied to a fiber subjected to varying stresses or angular misalignments to determine the magnitude of these effects. The FRD was then determined for a fiber in a fiber positioner that will be used in the Subaru Prime Focus Spectrograph (PFS). The analysis we carried out for the PFS positioner suggests that effects of angular misalignment dominate and no significant FRD increase due to stress should occur. 

PFS (Prime Focus Spectrograph), a next generation facility instrument on the Subaru telescope, is now being tested on the telescope. The instrument is equipped with very wide (1.3 degrees in diameter) field of view on the Subaru's prime focus, high multiplexity by 2394 reconfigurable fibers, and wide waveband spectrograph that covers from 380nm to 1260nm simultaneously in one exposure. Currently engineering observations are ongoing with Prime Focus Instrument (PFI), Metrology Camera System (MCS), the first spectrpgraph module (SM1) with visible cameras and the first fiber cable providing optical link between PFI and SM1. Among the rest of the hardware, the second fiber cable has been already installed on the telescope and in the dome building since April 2022, and the two others were also delivered in June 2022. The integration and test of next SMs including near-infrared cameras are ongoing for timely deliveries. The progress in the software development is also worth noting. The instrument control software delivered with the subsystems is being well integrated with its system-level layer, the telescope system, observation planning software and associated databases. The data reduction pipelines are also rapidly progressing especially since sky spectra started being taken in early 2021 using Subaru Nigh Sky Spectrograph (SuNSS), and more recently using PFI during the engineering observations. In parallel to these instrumentation activities, the PFS science team in the collaboration is timely formulating a plan of large-sky survey observation to be proposed and conducted as a Subaru Strategic Program (SSP) from 2024. In this article, we report these recent progresses, ongoing developments and future perspectives of the PFS instrumentation.